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通过求解电子能量分布各向同性稳态破尔兹曼方程,获得放电泵浦F2分子激光器的等离子体的电子能量分布、各种反应速率系数,有助于了解F2分子激光形成机制。
The electron energy distribution and various reaction rate coefficients of the plasma of the pulsed F2 excimer laser were obtained by solving the isotropic Steady-State Boltzmann equation of electron energy distribution, which helps to understand the mechanism of F2 molecular laser formation.