论文部分内容阅读
以非球面为代表的复杂面形在现代光学系统中的应用越来越广泛,因为它比球面提供了更多的设计自由度,可用更少的元件达到更优的成像质量。然而非球面的多样性也带来了面形测量的难题,传统的零位测试没有灵活适应不同面形的能力。可变像差补偿技术对于提高检测柔性和效率具有重要意义。针对回转对称非球面的球差补偿,分析了部分补偿透镜、相位板组合和高次非球面单透镜等可变补偿方案;针对离轴非球面的像差补偿,分析了倾斜球面系统、Risley棱镜和双回转相位板的可变补偿方案;进而介绍了变形镜和空间光调制器(SLM)作为可编程补偿器用于波面干涉测量的研究进展。最后指出可变像差补偿技术面临的大范围和多模式像差补偿、回程误差补偿以及失调像差解耦三个主要问题。
The complex shape represented by aspheric surface is more and more widely used in modern optical systems because it offers more design freedom than spherical surface and achieves better image quality with fewer components. However, the aspheric diversity also brings the difficulty of surface shape measurement, the traditional zero test does not have the flexibility to adapt to different shapes. Variable aberration compensation technology for improving the detection of flexibility and efficiency of great significance. Aiming at the spherical aberration compensation of the rotationally symmetric aspheric surface, the variable compensation schemes of partial compensating lens, phase plate combination and high order aspherical single lens are analyzed. For the aberration compensation of off-axis aspheric surface, the tilting spherical system, Risley prism And double-turn phase plate. Secondly, the research progress of deformable mirrors and spatial light modulator (SLM) as programmable compensators for wavefront interferometry is introduced. Finally, three major problems of wide range and multimode aberration compensation, return error compensation and offset aberration decoupling of variable aberration compensation are pointed out.