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从标量衍射理论出发，首先从理论上计算出多台阶二元光学元件发生深度误差时衍射效率的解析式；然后以4台阶和8台阶闪耀光栅为例，对二元光学元件套刻制作中的主要误差及其这些误差之间的相互影响进行了系统的分析和计算机模拟研究，模拟结果给实际制作提供了重要理论指导和实验参数。
Based on the theory of scalar diffraction, the analytic formula of the diffraction efficiency of multi-step binary optical elements is first calculated theoretically. Then, using the 4-step and 8-step blazed gratings as an example, Main error and their interaction between these errors were systematically analyzed and computer simulation studies, the simulation results to the actual production provides an important theoretical guidance and experimental parameters.