引言 皮拉尼真空计系测量真空系统内低压强的一种工具。它具有连续测量,操作方便及测量真空系统内的总压强值等优点,因此在真空技术中得到广泛的应用。我所生产及使用的P Z── Ⅰ型皮拉尼真空计量程范围较窄,在测量下限上不能 与电离真空计相衔接,又因玻璃规管易破损, 不适宜 Introduction Pirani gauges are a tool for measuring the low pressure in a vacuum system. It has the advantages of continuous measurement, easy operation and measurement of the total pressure in the vacuum system, etc. It is widely used in vacuum technology. I produced and used by the P Z ─ ─ Ⅰ Pirani vacuum gauge measuring range is narrow, the lower limit of the measurement can not be linked with the ionization gauge, but also due to glass regulatory damage, not suitable