Zeeman双折射双频激光器能够输出3~40 MHz频差的双频激光,可用作高测速双频激光干涉仪的光源。针对这种激光器的特点,以频差约7 MHz的Zeeman双折射双频激光器为干涉仪的光源,建立了中频差双频激光干涉仪测量系统。经过与商用HP5528A双频激光干涉仪的比对测量实验得出,中频差双频激光干涉仪实验测量系统测量线性度小于0.002%,测量的标准不确定度小于0.1μm,证明了中频差双频激光干涉系统的可行性和针对这种光源采用的设计方案的正确性。 Zeeman birefringent dual-frequency lasers produce dual-frequency laser with 3 to 40 MHz frequency difference and can be used as a light source for high-speed dual-frequency laser interferometers. According to the characteristics of this kind of laser, a dual-frequency laser interferometer with a frequency difference of about 7 MHz was used as the light source of the interferometer. After comparing with the commercial HP5528A dual-frequency laser interferometer, the measured linearity of the experimental system is less than 0.002% and the standard uncertainty of measurement is less than 0.1μm, which proves that the intermediate frequency difference dual frequency The feasibility of laser interference system and the correctness of the design scheme adopted for such light source.