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制备了带有金属纳米颗粒结构的微小孔径垂直腔面发射激光器(NA-VCSEL)。当小孔和金属颗粒的直径分别为400 nm和100 nm时,其最大输出光功率达到了0.5 mW,比400 nm单个小孔的最大输出光功率提高了0.2 mW。实验和理论验证了金属纳米颗粒结构对NA-VCSEL输出光功率的增强作用。
A micro aperture vertical cavity surface emitting laser (NA-VCSEL) with a metal nanoparticle structure was fabricated. When the diameters of the holes and the metal particles are 400 nm and 100 nm respectively, the maximum output optical power reaches 0.5 mW, which is 0.2 mW higher than the maximum output optical power of a single aperture of 400 nm. Experiments and theoretical results verify the enhancement of output power of NA-VCSEL by the structure of metal nanoparticles.