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本文首先对剪切干涉灵敏度讨论,得出需用变剪切干涉仪进行检测的结论。通过对各种形式变剪切干涉仪的使用和讨论,确定了立方棱镜变剪切干涉仪适用于实际检测。利用推导出剪切波面参数之间的关系,给出这种棱镜参数的选择公式。加工出这种干涉仪,并成功用于实际检测。利用改进后的波面重构方法,给出被检波面相对最佳参考球的定量结果。通过对剪切棱镜的误差分析,给出该干涉仪精度在λ/30的结果。
This paper first discusses the sensitivity of shear interference and concludes that it needs to be tested with a variable shear interferometer. Through the use and discussion of various forms of variable shear interferometer, it is confirmed that the cubic prism shear-shear interferometer is suitable for the actual detection. The relationship between the parameters of the shear wave was deduced and the formula for choosing the prism parameters was given. This interferometer is machined and used successfully for actual inspection. Using the improved wavefront reconstruction method, the quantitative results of the relatively optimal reference sphere of the wavefront is given. Through the error analysis of the prisms, the result of the interferometer with the accuracy of λ / 30 is given.