论文部分内容阅读
为提高负离子注入机控制系统的自动化水平,在调研吸收近几年来测控技术发展成果的基础上,完成了负离子注入机缝隙控制的设计实现。
In order to improve the automation level of the control system of the negative ion implanter, the design and implementation of the gap control of the negative ion implanter was completed on the basis of investigating and absorbing the achievements of the monitoring and control technology in recent years.