一、前言用离子镀方法进行反应气相沉积超硬耐磨涂层是七十年代物理气相沉积技术的一项重大突破。而中空热阴极离子镀是一项新近发展起来的离子镀技术。由于它具有沉积速度快、离化程度高、高速中性粒子多等特点,所以沉积涂层具有好的反应性、结合性等优点,加之设备简单、操作容易、价格低廉、无公害等特点,因此是一项适于工业生产的离子镀技术。国外用此技术已经制作了铬—氮、铬—碳、钛—氮、钛—碳超硬涂 I. Introduction Precursor Reactive Vapor Deposition by Ion Plating Super hard abrasion resistant coating is a major breakthrough in physical vapor deposition technology of the seventies. The hollow hot cathode plating is a newly developed ion plating technology. Because of its rapid deposition rate, high degree of ionization, high-speed neutral particles and other characteristics, so the deposited coating has good reactivity, combined with the advantages, coupled with simple equipment, easy operation, low cost, pollution-free features, Therefore, it is suitable for industrial production of ion plating technology. Abroad with this technology has produced chromium - nitrogen, chromium - carbon, titanium - nitrogen, titanium - carbon super hard coating