大规模集成电路制造装备及成套工艺重大专项领导小组紧紧围绕党中央国务院有关要求,以科学发展观统领,把科技带动产业良性发展,推动产业综合实 Large-scale integrated circuit manufacturing equipment and complete sets of major leading group closely around the Central Party Central Committee and State Council requirements, with the scientific concept of development under the command of the science and technology to promote the sound development of the industry, and promote comprehensive industrial real