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研究了双层辉光离子钨钼共渗在离子轰击条件下形成渗层和无离子轰击时形成沉积层的表观过程 .结果表明 ,在形成沉积层时 ,由于离子轰击作用已不存在 ,使渗层厚度减少 2 6% ,用朗缪尔探针对双层辉光离子钨钼共渗过程进行了等离子体的诊断 ,等离子体对表面成分有较大影响 .合理的等离子体密度范围为 5× 1 0 11～ 3× 1 0 12 cm-3 .
The apparent process of formation of sedimentary layer by double glow-tungsten-molybdenum co-infiltration under ion bombardment was studied. The results show that there is no ion bombardment in the formation of sedimentary layer, The thickness of the diffusion layer decreased by 26%, the plasma was diagnosed by the Langmuir probe on the tungsten-molybdenum co-infiltration process with double glow and the plasma had a great influence on the surface composition.The reasonable plasma density range was 5 × 1 0 11 ~ 3 × 10 12 cm-3.