从理论上分析了硅基二氧化硅光波导器件的芯区尺寸、相对折射率差、内应力和弯曲半径对器件偏振特性的影响 ,得出结论 :小折射率差的正方形波导的双折射系数小 ;内应力对双折射的影响比几何参数大 ;弯曲半径较小时 ,双折射系数较大 ,弯曲损耗也较大。 The influence of core size, relative refractive index difference, internal stress and bending radius on the polarization characteristics of silicon-based silica optical waveguide device is theoretically analyzed. It is concluded that the birefringence coefficient of square waveguide with small refractive index difference The effect of internal stress on birefringence is larger than the geometric parameters. When the bending radius is small, the birefringence coefficient is larger and the bending loss is larger.