采用光纤脉冲激光器对化学气相沉积金刚石薄膜进行了锥形微孔阵列加工,研究了激光扫描速度、扫描次数和脉冲宽度等参数对微孔形状和尺寸的影响规律。研究发现,激光扫描速度对微孔尺寸的影响不明显。而激光扫描次数对微孔出口直径影响明显。随着激光脉宽的增加,微孔深度和出口直径均增加,但微孔锥度减小。 The optical fiber pulsed laser was used to process the diamond film of chemical vapor deposition. The effects of laser scanning speed, scanning times and pulse width on the shape and size of micropores were studied. The study found that the effect of laser scanning speed on the pore size is not obvious. The number of laser scanning microporous exit diameter significantly affected. With the increase of laser pulse width, both the depth of micropore and the diameter of outlet increased, but the micropore taper decreased.