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实现了一种准分子激光光刻光源中心波长的实时测量方法。基于法布里珀罗(F-P)标准具与中阶梯光栅的相关测量装置,通过对F-P标准具的干涉条纹和光栅衍射条纹的分析,实现了对光刻光源输出激光中心波长的在线有效测量。整个测量装置体积小、成本低,在500~3 000 Hz高重频条件下,实现了亚pm量级的测量精度,标准差低于0.1pm,取得了较好的实验结果。
Realization of a real-time measurement of the center wavelength of excimer laser lithography light source. Based on the correlation measurement between Fabry-Perot (F-P) etalon and middle-stepped grating, an effective on-line measurement of the laser center wavelength of the output laser of lithography light source is realized by analyzing the interference fringes and grating diffraction fringes of the F-P etalon. The whole measuring device is small in size and low in cost. Under the conditions of high repetition frequency of 500-3000 Hz, the measurement accuracy of sub-pm level is achieved, the standard deviation is less than 0.1pm, and good experimental results are obtained.