一、前言 超高真空技术从50年代初期开始到现在已发展到成熟阶段了。在此期间,宇宙开发竞争使其规模得到巨大发展。粒子加速器和核聚变实验装置的应用,更有助于增加其复杂性和多歧性,但是超高真空技术的主要应用范围始终是向着表面科学实验装置以及表面分析装置等方面发展。最? First, the preface Ultra-high vacuum technology from the early 1950s until now has reached a mature stage. During this period, competition in the development of the universe has made great strides in its scale. Particle accelerator and nuclear fusion experimental device application, but also help to increase its complexity and multiple, but the main application of ultra-high vacuum technology is always toward the surface science experimental devices and surface analysis devices and other aspects of development. most?