薄膜设计和制造技术的不断进步使光学镀膜的品质和性能不断完善,薄膜制造的所有阶段实际上正经历重大变革。例如基底清洁是获得高品位薄膜的关键。以往从油扩散泵到无油低温泵变革的实际镀膜过程中,清洁度已得到改善。现在超净室内制 The continuous improvement of thin film design and manufacturing technology has led to the continuous improvement of the quality and performance of optical coatings, and virtually all stages of thin film manufacturing are undergoing major changes. For example, substrate cleaning is the key to obtaining high grade films. In the past from oil diffusion pump to oil-free cryogenic pump changes in the actual coating process, the cleanliness has been improved. Now clean indoor system