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针对扫描干涉光刻机对干涉光束的高精度位姿准直需求,设计了高精度光束自动准直系统;基于该系统提出了利用每步迭代调节后的位姿实测值作为下一步迭代的起始值进行迭代准直和正交平面内位姿交替准直的光束位姿迭代准直策略,解决了迭代过程误差积累问题和正交平面内电机耦合问题。实验结果显示:该光束自动准直系统能够实现两个位置准直精度均优于5μm和两个角度准直精度均优于3μrad,满足扫描干涉光刻机光束位姿准直精度需求。
Aiming at the high-precision collimation requirements of interferometric beams for scanning interference lithography, a high-precision automatic beam alignment system is designed. Based on the proposed system, the measured position and orientation values obtained after each iteration are used as the next iteration The iterative collimation method of iterative collimation and beam-position iteration of alternating collimation in orthogonal plane to solve the iterative process error accumulation and the in-plane motor coupling problem. Experimental results show that the beam auto-collimation system can achieve better than 5μm collimation accuracy at both positions and better than 3μrad collimation accuracy at both angles to meet the needs of collimation accuracy of the beam position and orientation of the scanning interference lithography machine.