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为准确测量上海光源软X射线谱学显微光束线采用的变包含角平面光栅单色仪的转角重复精度,提出了一种新的基于相位板衍射准直技术的测量方法。该方法将半导体激光单模光纤和相位板衍射准直技术结合起来,利用面阵CCD采集图像,通过测量光斑的位移变化确定平面镜和光栅的角度变化。实验表明,该方法可以测量掠入射情况下单色仪联动时的转角重复精度,测量精度可达±0.1″,此测量精度优于同等实验条件下的商用ELCOMAT3000自准直仪的测量精度。
In order to accurately measure the angular repeatability of the variable inclusion angular flat grating monochromator used in Shanghai X-ray spectrum of soft light X-ray spectroscopy, a new measurement method based on the phase plate diffraction alignment technique was proposed. The method combines the semiconductor laser single-mode optical fiber and the phase plate diffraction collimation technique, acquires the image by the area array CCD, and determines the change of the angle of the plane mirror and the grating by measuring the displacement of the light spot. Experiments show that the method can measure the rotation angle of the monochromator with the grazing incidence, and the accuracy is up to ± 0.1 ". The accuracy of this method is better than that of the commercial ELCOMAT3000 autocollimator under the same experimental conditions.