A substrate with Ni/Ti/Si structure was used to grow vertical carbon nanotubes (CNTs) with a graphite film over CNT tops by thermal chemical vapor deposition with CH4 gas as carbon source.The carbon nanotubes and the substrate were character-ized by a field emission scanning electron microscope for the morphologies,a transmission electron microscope for the microstruc-tures,a Raman spectrograph for the crystallinity,and an Auger electron spectrometer for the depth distribution of elements.The re-sult shows that when the thickness ratio of Ni layer to Ti layer in substrate is about i,a graphite film with relatively good quality canbe formed on the CNT tops.