对激光平板型扫描对准和测试系统中的暗视场测量方法进行了研究。分析了该系统的线性扫描误差和系统参数之间的关系。提出一种满足设计要求的实用的光学系统,理论分析和实践证明,该系统具有结构简单、调试方便,并且具有克服了反射式多面转镜扫描系统中存在的入瞳漂移的缺陷等一系列优点。 The dark field measurement method in laser flatbed scanning alignment and test system was studied. The relationship between the linear scan error of the system and the system parameters is analyzed. A practical optical system is proposed to meet the design requirements. The theoretical analysis and practice prove that the system has the advantages of simple structure, convenient debugging and a series of advantages such as overcoming the drift of the entrance pupil in the reflective multi-facet mirror scanning system .