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本文介绍了一种新的电磁力驱动振膜真空计,它的压强量程覆盖10 ̄-2Pa-latin,如需要上限可高达2atm。改进电路稳定性后,下限可低10 ̄-3Pa。与现今的静电力驱动振膜真空计相比,高压强扩展了一个量级。该振膜规管的特征是振膜两侧分别固定一个带磁极的驱动线圈和信号线圈。驱动线图通以激励文变电流后,产生一个交变电磁力,推动振膜和信号线圈振动,信号线圈再切割磁力线,从而感应出一个与压强有关的电动势。这种规管工艺制作简单,价格低。
This article describes a new electromagnetic force driven diaphragm vacuum gauge, the pressure range covers 10 ~ -PaPa-latin, such as the need for up to 2atm. Improve the stability of the circuit, the lower limit of 10 ~ -3Pa. Compared with today’s electrostatic force driven diaphragm vacuum gauges, the high pressure is extended by one order of magnitude. The characteristic of the diaphragm regulation is that the two sides of the diaphragm are respectively fixed with a driving coil and a signal coil with a magnetic pole. The drive line diagram to stimulate the Wen Wen current, the generation of an alternating electromagnetic force to promote vibration of the diaphragm and the signal coil, the signal coil and then cut the magnetic field lines, which induced a pressure-related electromotive force. This regulation process is simple, low price.