石英微机械陀螺敏感器件通常采用一体式音叉结构,具有较高的可靠性,但由于在敏感芯片中设计了挠性结构,挠性结构的参数及加工质量是影响器件可靠性的关键因素。分析了敏感芯片挠性结构在外力作用下的应力分布及结构缺陷对其影响,分析了其失效模式。试验结果验证了分析的准确性,分析结果可作为改进敏感器件可靠性的依据。 Quartz micromechanical gyrosensors usually adopt integrated tuning fork structure, which has high reliability. However, due to the flexible structure designed in the sensitive chip, the parameters of flexible structure and processing quality are the key factors affecting the reliability of the device. The stress distribution and structural defects of the flexible chip flexible structure under external force were analyzed, and the failure mode was analyzed. Experimental results verify the accuracy of the analysis, the results of the analysis can be used as a basis for improving the reliability of sensitive devices.