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利用激光诱导与化学镀铜的方法在聚酰亚胺薄膜上制备了太赫兹线栅偏振器和带阻滤波器,用太赫兹时域光谱系统对所制备的器件进行了测试。测试结果表明,该方法制备的太赫兹线栅偏振器在0.2～1.5THz范围内的消光比优于20dB,耶路撒冷十字结构带阻滤波器的3个中心频率分别为0.41、1.07、1.47THz。实验结果与时域有限差分法的仿真结果基本相符。研究表明激光诱导与化学镀铜是一种简单灵活且能有效地制备太赫兹器件的方法。
Terahertz-wave grid polarizers and band-stop filters were fabricated on polyimide films by laser-induced and electroless copper plating. The fabricated devices were tested by terahertz time-domain spectroscopy. The test results show that the extinction ratio of the THz wire grid polarizer fabricated in this method is better than 20dB in the range of 0.2-1.5THz, and the three center frequencies of the Jerusalem cross structure bandstop filter are respectively 0.41, 1.07 and 1.47THz. The experimental results are in good agreement with the simulation results of the FDTD method. Research shows that laser-induced and electroless copper plating is a simple, flexible and effective method for the fabrication of terahertz devices.