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介绍了熔石英亚表面缺陷(SSD)的深度分布与粒径的量化关系及表面粗糙度的量化,以及杂质引起热破坏、裂纹导致电场增强、缺陷导致机械性能弱化3种诱导熔石英损伤的机理。还介绍了氢氟酸(HF)刻蚀和激光预处理2种非常有效的控制熔石英亚表面缺陷的技术,并对熔石英亚表面缺陷研究现状、存在问题和发展趋势进行了简要的总结和展望。
The quantitative relationship between the depth distribution and the grain size of the fused silica subgrains (SSD), the quantification of the surface roughness, the thermal damage induced by impurities, the electric field enhancement due to the crack, and the weakening of the mechanical properties caused by the defects were introduced. . In addition, two kinds of techniques of controlling hydrofluoric acid (HF) etching and laser pretreatment, which are very effective in controlling the surface defects of fused silica, are also introduced. The research status, existing problems and development trend of fused silica subsurface defects are briefly summarized. Outlook.