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以往研制的电子束曝光机图形发生器只能生成矩形和斜率有限的平行四边形,这造成了曝光精度和速度之间的矛盾。针对以上问题,本文介绍了一台可直接产生梯形的图形发生器,并对该机的测试结果进行了分析。
Previously developed electron beam exposure machine graphics generator can only generate a rectangular and slopes limited parallelogram, which led to the contradiction between exposure accuracy and speed. In view of the above problems, this article introduces a graph generator that can directly generate trapezoid, and analyzes the test results of this machine.