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采用声发射监测悬臂梁弯曲实验法测量并计算出HCD离子镀法制备的精细TiN陶瓷薄膜的抗拉强度,及其与钛基材界面抗剪切强度(结合强度)值分别是:603MPa,242MPa。
The tensile strength of the fine TiN ceramic film prepared by HCD ion plating and its interfacial shear strength (bond strength) values measured by acoustic emission monitoring cantilever bending method were calculated as follows: 603MPa, 242MPa .