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针对大口径方形超薄光学元件的抛光,提出一种新型的基于环摆抛的双面抛光方法,该方法将环形抛光和钟摆式抛光的运动方式和加工机理耦合起来,使其具备同步控制大口径方形超薄光学元件透射波前和反射面形的特点。从理论上介绍了该方法的抛光原理,利用研制的双面抛光原理样机,通过实验验证了对大口径超薄光学元件的面形修正能力,证实了这种双面抛光方法的可行性。该方法在控制大口径超薄光学元件的透射波前和反射面形上具有显著的效果。
Aiming at the polishing of large-diameter square ultra-thin optical components, a new double-side polishing method based on ring pendulum throwing is proposed, which combines the motion mode of circular polishing and pendulum polishing with the machining mechanism to make it have synchronous control The characteristics of the square and ultra-thin aperture optical components transmitted through the wavefront and the reflecting surface. The polishing principle of this method is introduced theoretically. The double-side polishing prototype prototype is developed. The surface modification capability of the large-diameter ultrathin optical element is verified by experiments. The feasibility of this double-side polishing method is verified. This method has a significant effect in controlling the transmitted wavefront and the reflective surface shape of a large-aperture ultrathin optical element.