提出一种新型的分布式反馈(DFB)半导体激光器,该激光器具有宽带波长可调谐、线宽窄、功率稳定的特点。该DFB激光器芯片通过采用非对称相移光栅结构,有效地压窄了输出光信号的线宽。基于高精度的温度和电流控制,有效控制激光器内部载流子动态特性与材料折射率,使得激光器输出波长可以实现宽带调谐,并且输出光功率保持稳定。其中,电流控制精度为10μA,温度控制精度为0.004℃,激光器的波长调谐范围为3.5nm,输出光功率为7.4mW,边模抑制比为52.7dB,线宽约为220kHz。该激光器有望应用于可调谐二极管激光吸收光谱(TDLAS)的研究中。 A new type of distributed feedback (DFB) semiconductor laser is proposed. The laser has tunable broadband wavelength, narrow linewidth and stable power. The DFB laser chip effectively narrows the linewidth of the output optical signal by adopting an asymmetric phase shift grating structure. Based on high-precision temperature and current control, the dynamic characteristics of carriers and the refractive index of materials can be controlled effectively. The laser output wavelength can realize broadband tuning and the output optical power can be kept stable. Among them, the current control accuracy of 10μA, temperature control accuracy of 0.004 ℃, the laser wavelength tuning range of 3.5nm, the output optical power of 7.4mW, side mode suppression ratio of 52.7dB, line width of about 220kHz. The laser is expected to be used in tunable diode laser absorption spectroscopy (TDLAS) research.