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光学读出式红外成像系统是近年来提出的一种新型红外成像技术,该技术是基于探测双材料微悬臂梁吸收红外辐射后的变形量.这种红外光学成像系统由微悬臂梁阵列和光学读出设备组成,在本文中,将首先论述其系统结构和成像原理;在此基础上,通过分析单个微梁的衍射谱在透镜谱面上空域分布特点,提出了一种改进的谱平面刀口滤波方法,特别是讨论了成像系统将热变形角度转换成图像灰度的原理以及影响因素,并深入分析了成像系统的灵敏度.最后,给出了利用本系统获得37℃和300℃温度的红外发光物体成像结果.
Optical readout infrared imaging system is a new type of infrared imaging technology proposed in recent years, which is based on the detection of deformation after absorbing infrared radiation by two-material microcantilever.This infrared optical imaging system consists of a micro-cantilever array and optical In this paper, the system structure and imaging principle will be discussed firstly. Based on the analysis of the spatial distribution of the diffraction spectrum of a single microbeam on the spectral surface of the lens, an improved spectral plane blade Especially the principle and influencing factors of image transformation from thermal deformation to image grayscale and the sensitivity of imaging system are discussed in detail.Finally, the infrared Luminous object imaging results.