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详细介绍了一台我院新近研制的多功能复合离子镀膜机。该机配有柱弧源、电磁控大面积弧源、小多弧源,使得在不同材质的工件上原位连续镀制各种多层膜及复合化合物膜;偏压电源采用我院自行开发的叠加式直流脉冲偏压开关电源,使用该电源可有效控制基体温度,实现远离平衡态的低温沉积镀膜工艺;全部控制及工艺流程采用PLC(可编程控制器)自动控制,具有成本低、效率高、膜系质量优、工艺可重复性好等特点。用该设备开发的一些功能膜复合工艺已获得实际应用,取得了良好的使用效果。
Introduced in detail a newly developed multifunctional ion plating machine in our hospital. The machine is equipped with a column arc source, electromagnetic control of a large area arc source, a small multi-arc source, making the workpiece in different materials in situ continuous plating of a variety of multi-layer film and composite compound film; bias power supply using our own development Of superimposed DC pulse bias switching power supply, the use of the power supply can effectively control the substrate temperature, to achieve a far away from the equilibrium state of low temperature deposition coating process; all control and process using PLC (programmable logic controller) automatic control, with low cost, efficiency High, excellent film quality, process repeatability and so on. Some functional membrane composite processes developed by this equipment have been put into practical application and good results have been achieved.