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对介质-金属组合的建筑节能薄膜进行了理论设计,给出了双层和三层膜的理论参数。用计算机模拟了大面积薄膜的膜厚均匀性分布,获得了最佳的蒸发源配置,实验上达到了满足实际使用的均匀性要求。最后给出了实际样品的光谱特性。
The theoretical design of the medium-metal composite building energy-saving thin film is given, and the theoretical parameters of the double-layer and triple-layer films are given. The distribution of film thickness uniformity of large area film was simulated by computer, and the optimal configuration of evaporation source was obtained. The uniformity of the film was satisfied experimentally. Finally, the spectral characteristics of the actual sample are given.