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  5. Cross-sectional investigation of radiation damage of 2 MeV proton-irradiated silicon carbide

Cross-sectional investigation of radiation damage of 2 MeV proton-irradiated silicon carbide

来源 :核技术：英文版 | 被引量 : 0次 | 上传用户：hangarfield
【摘 要】
：
Cross-sectional investigation is an important method to study ion irradiation effects in the depth direction.In this study, 2 MeV H? was implanted in 6H-SiC sin
【作 者】
：
Xu Wang Yan-Wen Zhang Dong Han 
【机 构】
：
InstituteofMaterials,DepartmentofNuclearPhysics,StateKeyLaboratoryofNuclearPhysicsandTechnology
【出 处】
：
核技术：英文版
【发表日期】
：
2018年4期
【关键词】
：
SiC PROTON IRRADIATION CROSS-SECTIONAL analysis RAMAN spectroscopy SEM 
【基金项目】
：
This work was supported by the National Natural Science Foundation of China (Grant Nos. 11705169, 91426304 and 91226202).
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Cross-sectional investigation is an important method to study ion irradiation effects in the depth direction.In this study, 2 MeV H? was implanted in 6H-SiC single crystals to investigate the effects of light ion irradiation on SiC. Raman spectroscopy and
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