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采用溶胶凝胶法在LiAlO2(302)衬底上制备了ZnO薄膜。用X射线衍射(XRD)和扫描电镜(SEM)对样品的结构和形貌进行了表征。XRD结果表明,随着热处理温度的升高(350℃、450℃、550℃、600℃、800℃),所得到的薄膜分别为单相ZnAl2O4(350℃),ZnAl2O4和ZnO的混合相(450℃)以及单相的ZnO(550℃、600℃、800℃),并且ZnO薄膜c轴择优取向的生长趋势随温度升高相应明显。SEM图像显示,随着热处理温度的升高,ZnO薄膜的粒径相应变大。
ZnO thin films were prepared on LiAlO2 (302) substrates by sol-gel method. The structure and morphology of the samples were characterized by X-ray diffraction (XRD) and scanning electron microscopy (SEM). The results of XRD show that the films obtained at 350 ℃, 450 ℃, 550 ℃, 600 ℃ and 800 ℃ are single phase ZnAl2O4 (350 ℃), mixed phase ZnAl2O4 and ZnO (450 ℃) and single-phase ZnO (550 ℃, 600 ℃, 800 ℃), and the growth trend of the c-axis preferred orientation of ZnO thin films is correspondingly obvious with the increase of temperature. The SEM images show that with the increase of the heat treatment temperature, the size of ZnO thin films increases accordingly.