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0626006IBAD制备非晶碳膜与CrN镀层的耐磨性能比较及机理分析〔刊,中〕/杜军//真空科学与技术学报.—2006,26(3).—255-258(L)采用离子束辅助溅射沉积(IBAD)法,在高速钢基体上制备非晶碳膜(a-C)及CrN镀层,对两者的耐磨性能分析比较,并对其耐磨机理进行分析。结果表明:非晶碳膜
0626006 Comparison and Mechanism Analysis of Abrasion Resistance of Amorphous Carbon Films and CrN Coating Prepared by IBAD [J]; Journal of Vacuum Science and Technology; 2006 -02 (3) Beam assisted sputtering deposition (IBAD) method, the amorphous carbon film (aC) and CrN coating were prepared on the high speed steel substrate, the wear resistance of the two films was analyzed and compared, and the wear resistance mechanism was analyzed. The results show that amorphous carbon film