利用波长为248nm的氟化氪（KrF）准分子激光器加工了掺镧锆钛酸铅压电陶瓷（PZT）、硅（Si）和聚二甲基硅氧烷（PDMS）,研究了准分子激光对这3种材......

Ceramic materials are increasingly used in micro-electro-mechanical systems (MEMS) as they offer many advantages such as......

基于双光子吸收微制造原理和自制双光子微制造系统,对不同激光功率和不同曝光时间下,轴承的微加工成型性进行了研究.在photomer 30......

For the purpose of improving the precision of the inertial guidance system, it is necessary to enhance the accuracy of t......