Fluorine-free metal organic deposition (FF-MOD) routes for synthesis of high-performance YBCO superconducting films have attracted many attentions recently,in whose process the absence of toxic evolved gases and the high growth rate of the film are addressed.In contrast to traditional trifluoroacetate metal organic deposition routes which have been extensively investigated for many years,the fundamental understanding of FF-MOD routes are far from being achieved.In this paper,we focus on a novel FF precursor which has a great potential to yield high superconducting properties in YBCO films.Nucleation and growth behaviours in the FF-MOD process are comprehensively studied by means of XRD,SEM,EDS as well as EBSD technique.