论文部分内容阅读
Analysis of Residual Stress in TiN Film Fabricated by Plasma Immersion Ion Implantation and Depositi
【机 构】
：
Faculty of Materials Science and Engineering, Kunming University of Science and Technology, Kunming
【出 处】
：
The 11th International Workshop on Plasma-Based Ion Implanta
【发表日期】
：
2011年3期
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