利用金属/电介质光子晶体(MDPC)对黑体热辐射光谱有增强透射和滤波的剪裁特性,制成能够发射出高性能、可调谐窄带相干光的等离子体微机电系统(MEMS)红外光源。其工作波长可选择性、工艺简单、成本低和MEMS化等优点使其在生物、医学和军事等领域得到广泛的应用。对该器件的结构与材料选择、工作机理、工艺流程及性能表征和研究进展进行了详细的综述,对其在微型非色散红外(NDIR)气体传感系统中的应用前景进行了展望。 By using metal / dielectric photonic crystal (MDPC) to enhance the transmission and filtering tailoring characteristics of blackbody thermal radiation spectrum, a plasma micro-electromechanical system (MEMS) infrared light source capable of emitting high-performance tunable narrow-band coherent light is fabricated. Its working wavelength selectivity, simple process, low cost and MEMS advantages make it widely used in biological, medical and military fields. The device structure and material selection, working mechanism, process flow and performance characterization and research progress are reviewed in detail, and its application prospects in the miniature non-dispersive infrared (NDIR) gas sensing system are prospected.