论文部分内容阅读
浙江大学高纯硅及硅烷实验室,始建于1959年,1985年被国家教委批准为重点实验室,1987年11月通过国家级验收。实验室由阙端麟教授为主要学术带头人,姚鸿年教授任实验室主任。本实验室以多种形式接纳国内外学者。它的主要研究方向和内容是: 1.高纯硅烷的应用开发研究:如硅烷的各种沉积膜的制取及应用;
Zhejiang University high purity silicon and silane laboratory, was founded in 1959, 1985 by the State Board of Education approved as a key laboratory, in November 1987 passed the national inspection. Laboratory Professor Que Dulin as the main academic leader, Professor Yao Hongnian served as laboratory director. The laboratory to accept domestic and foreign scholars in many forms. Its main research directions and contents are as follows: 1. Development and application of high purity silane: Preparation and application of various deposited films such as silane;