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自行设计制造了φ60mm钟罩式化学气相沉积炉、等离子体增强化学气相沉积TiN实验装置、TiN涂层磁控反应溅射装置和乙腈挥发装置等,系统地研究了涂层压力等工艺参数对涂层合金性能的影响,制定了较为合理的工艺,试制出性能较为理想的涂层刀片。以YT14刀片为基体,采用CVD法进行TiC、TiN和TiC(N)涂层后的样品在加工高强度钢时,其耐用度相当于YT14刀片的5～6倍。应用中温CVD法涂敷的Ti(CN)涂层合金,其显微硬度值(HV)为18～25GP_2,抗弯强度下降值仅为16％(高温CVD涂层合金的
Design and manufacture of φ60mm bell-type chemical vapor deposition furnace, plasma-enhanced chemical vapor deposition TiN experimental device, TiN coating magnetron reactive sputtering device and acetonitrile volatilization device, etc., systematically studied the coating pressure and other process parameters on the coating Layer alloy performance, developed a more reasonable process, try out a better performance of the coated blade. YT14 blade as the substrate, the CVD method for TiC, TiN and TiC (N) coated samples in the processing of high-strength steel, the durability of YT14 blade is equivalent to 5 to 6 times. The Ti (CN) coating alloy coated by medium temperature CVD has a microhardness (HV) of 18 ~ 25GP_2 and a decrease of flexural strength of only 16% (high temperature CVD coating alloy