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综述微尺度热科学的理论建模、实验测试方法及计算机模拟等三方面的研究进展,重点讨论各理论模型的适用条件及优缺点。从线性波尔兹曼传输方程的解得出声子散射热传输方程。体积和重量不断减少的半导体微尺度器件中的非金属薄膜材料传热机理的研究将会促成一些新的工程应用,有可能开辟新的市场,并为有关基础探索提供了崭新的研究手段。
This paper reviews the research progress of theoretical modeling, experimental testing methods and computer simulation of micro-scale thermal science, and focuses on the applicable conditions, advantages and disadvantages of each theoretical model. The phonon scattering heat transfer equation is derived from the solution of the linear Boltzmann transmission equation. The research on the heat transfer mechanism of non-metallic thin film materials in the semiconductor micro-scale devices with decreasing volume and weight will lead to some new engineering applications, may open up new markets and provide a brand new research method for the exploration of relevant foundations.