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本文综述大剂量注入氮离子的SOI技术及共新近进展,并与大剂量注入氧离子的SOI技术作了比较,指出了氮SOI的研究方向,探讨了注氮SOI的形成机理。
In this paper, the SOI technology of high-dose nitrogen ion implantation and its recent progress are summarized. Compared with the SOI technology of high-dose oxygen ion implantation, the research direction of nitrogen SOI is pointed out and the formation mechanism of SOI is also discussed.