提出了一种高分辨率、高频响的光栅纳米测量细分方法——动态跟踪细分法 .它综合了计算机正切细分法细分份数大、电阻链细分法工作速度快、频响亮的优点 ,电路原理清晰、结构简单 ,能够同时适用于动态和静态测量 ,较好地解决了光栅纳米测量的信号处理过程中的高速度与高分辨率、高准确度的矛盾 .实验表明 ,动态跟踪细分法能够在 40 0细分时实现10 0 k Hz以上的频率响应速度 ,配合信号周期 2μm的光栅传感器 ,可以得到 5 nm的测量分辨率 ,为光栅纳米测量技术应用于实时测量和实时控制打下了良好的基础 ,是一种非常有发展前途的新的莫尔条纹细分方法 A high-resolution and high-frequency grating sub-measurement method based on dynamic tracking subdivision is proposed.It combines the large number of subdivision of computer tangential subdivision, the high speed of subdivision of resistance chain, Loud and clear advantages, the circuit principle is clear, the structure is simple, and can be applied to dynamic and static measurements at the same time, which solves the contradiction between high speed, high resolution and high accuracy in the signal processing of grating nanometer measurement well, The dynamic tracking subdivision method can achieve the frequency response above 10 0 Hz at 40 0 ​​subdivision, and the 5 nm measurement resolution can be obtained with the grating sensor with the signal period of 2 μm. In order to apply the grating nano measurement technology to the real-time measurement and Real-time control laid a good foundation, is a very promising new Moiré fringe subdivision method