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研究了TiN SiC纳米多层膜中立方SiC(B1 cubicSiC)的形成及其对TiN SiC多层膜力学性能的影响 .结果表明 :在TiN SiC多层膜中 ,非晶态的SiC层在厚度小于 0 6nm时形成立方结构并与TiN形成共格外延生长的超晶格柱状晶 ,使多层膜产生硬度和弹性模量显著升高的超硬效应 ,最高硬度超过 6 0GPa .SiC随着层厚的增加转变为非晶相 ,从而阻止了多层膜的共格外延生长 ,使薄膜呈现TiN纳米晶和SiC非晶组成的层状结构特征 ,同时多层膜的硬度和弹性模量下降 .TiN SiC纳米多层膜产生的超硬效应与立方SiC的形成及多层膜共格生长有关
The formation of cubic cubic SiC (SiC) in TiN SiC multilayers and its effect on the mechanical properties of TiN SiC multilayers were investigated. The results show that in TiN SiC multilayers, 0 6nm to form a cubic structure and with the formation of epitaxial growth of TiN superlattice columnar crystal, multi-layer film hardness and elastic modulus significantly increased superhard effect, the maximum hardness of more than 6GPa. SiC with layer thickness Of the amorphous phase, thereby preventing the coexistence of multilayer epitaxial growth, the film presents the layered structure features of TiN nanocrystalline and amorphous SiC, while the multilayer film hardness and elastic modulus decreased .TiN The superhardness effect of SiC nano-multilayer film is related to the formation of cubic SiC and the coherent growth of multilayer film