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本文研究了微波等离子体化学气相沉积制备金刚石薄膜的宏观控制参量对成核和生 长过程的影响．过高的碳源浓度、低的衬底温度不利于金刚石膜的生长．在金刚石膜的 成核和生长期采用不同的条件，生长出晶形较好的金刚石薄膜。
In this paper, the influence of macroscopic control parameters on the nucleation and growth process of diamond films prepared by microwave plasma chemical vapor deposition was studied. Too high carbon source concentration, low substrate temperature is not conducive to the growth of diamond film. In the nucleation and growth of diamond films using different conditions, the growth of a better shape diamond film.