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57Fe+和N2+双离子注入Cu衬底中,在室温时形成了NaCl结构的FeNx,x约在0.63-0.65间。退火过程中发现,由于氮的存在,氮原子影响了α-Fe的体扩散温度,分解的α—Fe可重新聚集在含N的原子组团中,形成新的α—Fe颗粒,其分解温度可高于600℃。
57Fe + and N2 + ions were implanted into the Cu substrate. At room temperature, a FeNx structure of NaCl was formed, with x about 0.63-0.65. Annealing process found that, due to the presence of nitrogen, nitrogen atoms affect the bulk diffusion temperature α-Fe, α-Fe decomposition can be re-aggregated in the atomic group containing N to form a new α-Fe particles, the decomposition temperature Higher than 600 ℃.