为建立一套较好的KrF激光反应动力学模型,以对激光系统的搭建提供必要的理论指导,并能从理论角度对激光系统的实验结果加以解释,本文结合实验室工作,考虑了24种粒子、120种反应通道,建立了最基本的零维数值模拟程序,对电子束泵浦的KrF准分子激光器的反应动力学过程进行了研究,计算了反应过程中小信号增益随泵浦时间的变化关系(图1),研究了混合气体的气 In order to establish a good KrF laser reaction kinetic model, in order to provide the necessary theoretical guidance for the construction of the laser system, and to explain the experimental results of the laser system theoretically. In this paper, 24 kinds of Particles and 120 kinds of reaction channels, the most basic zero-dimensional numerical simulation program was established. The reaction kinetics of electron beam-pumped KrF excimer laser was studied. The change of small signal gain with pump time was calculated Relationship (Figure 1), studied the gas mixture