随着科学技术的飞跃发展，对光学器件中光学薄膜的要求也越来越高，就我国目前光学真空镀膜设备来看，都远不能满足新的生产要求。仅靠以前的热蒸发，电子枪的直论、环枪蒸发是不够的，直枪和环枪都因其缺陷而被淘汰，随之而发展起来的激偏转电子枪，则显现其优越性。所以，在? With the rapid development of science and technology, the requirements for optical films in optical devices are also getting higher and higher. As far as China’s current optical vacuum coating equipment is concerned, they are far from meeting new production requirements. Previously only thermal evaporation, the gun straightforward, ring gun evaporation is not enough, both guns and ring guns are eliminated due to their defects, followed by the development of deflected electron gun, it shows its superiority. So, at?