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利用磁控溅射,采用钛靶和铝靶按照一定功率比在SiC纤维表面沉积钛与铝,制备SiC纤维的Ti-Al基复合先驱丝,按密排堆垛置于包套之中并经热等静压制备碳化硅纤维增强钛铝基试样。通过扫描电镜观察组织形貌,研究热等静压及真空热处理对组织结构、界面反应层的影响,应用XRD与能谱分析,研究磁控溅射功率对原子比的影响以及钛铝原位反应过程中相比例的变化规律,采用差示扫描量热法(DSC,differential scanning calorimetry)对钛铝反应进行动力学分析。结果表明,钛靶与铝靶的溅射功率直接影响钛铝的原子比,TC4和Al靶功率分别为13和4.5 kW/m2,其铝含量为27at%;TC4和Al靶功率分别为13和8.3 kW/m2,其铝含量为49at%。此外,动力学研究表明,Al3Ti是钛铝反应的优先生成相,随着Al的扩散,逐渐形成TiAl、Al2Ti和Ti3Al,但经过Al的充分扩散,其最终形成的稳定相取决于钛铝的原子比,若原子比为1:1,则最终形成TiAl相,且不同原子比区域形成的TiAl、Ti3Al可共存。
Using magnetron sputtering, the titanium target and the aluminum target are used to deposit titanium and aluminum on the surface of the SiC fiber according to a certain power ratio to prepare a Ti-Al-based composite precursor wire of SiC fiber, Hot Isostatic Pressing Preparation of Silicon Carbide Fiber Reinforced Titanium Aluminum Based Sample. The morphology of the microstructure was observed by scanning electron microscopy. The effects of hot isostatic pressing and vacuum heat treatment on the microstructure and interfacial reaction layer were investigated. The effects of magnetron sputtering power on the atomic ratio and in situ reaction of titanium and aluminum were studied by XRD and EDS. During the process, the kinetics of titanium-aluminum reaction was analyzed by differential scanning calorimetry (DSC). The results show that the sputtering power of titanium target and aluminum target directly affects the atomic ratio of titanium and aluminum. The TC4 and Al target powers are 13 and 4.5 kW / m2, respectively. The aluminum content is 27at%. The TC4 and Al target powers are 13 and 8.3 kW / m2 with an aluminum content of 49 at%. In addition, the kinetic studies show that Al3Ti is the preferential phase for the reaction of titanium and aluminum. With the diffusion of Al, TiAl, Al2Ti and Ti3Al are formed gradually. However, the stable phase formed by Al diffusion finally depends on the atoms of titanium aluminum Ratio, if the atomic ratio of 1: 1, the final formation of TiAl phase, and different atomic ratio of the region formed TiAl, Ti3Al coexist.