众所周知,在高真空和超高真空范围内,校准真空计,是通过测定校准室中的低压强,被校真空计和利用标准真空计直接测得的高压强之间建立的精确关系实现的。实际上,这种关系是利用各种形式的减压膨胀方法〔1～3)实现的,某些一级校准装置即按此原理进行工作[4～6]。它的主要缺点是没 It is well-known that calibrating gauges in the high vacuum and ultra-high vacuum ranges is achieved by measuring the precise relationship established between the low pressure in the calibration chamber, the calibrated gauge, and the high pressure measured directly with a standard vacuum gauge. In fact, this relationship is achieved using various forms of decompression expansion [1-3], and some primary calibration devices operate on this principle [4-6]. Its main drawback is no